Features
Specifications
| Model | XPS-7II | |||
| Target Gas | Semiconductor gases | |||
| Sensor Type | Electrochemical cell | |||
| Detection Range | ppm | |||
| Alarm Set Value | Depends on specifications | |||
| Alarm Indication | Buzzer sounds, Alarm lamp (RED) flashing, LCD display | |||
| Response Time | Within 60 seconds (60% response) | |||
| Sampling Method | Automatic suction-type | |||
| Power Supply |
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| Battery Life | Approx. 12 hours (When using the NF3 sensor unit: approx. 8 hours) (When using alkaline batteries, at 20°C, no alarm. Varies depending on environmental conditions, usage conditions, storage period, battery manufacturer, etc.) | |||
| Approvals | CE | |||
| Operating Temperature and Humidity | 0°C to 40°C 30 to 85% RH (no condensation) | |||
| External Dimensions | W62×H150×D128 mm (excluding protrusions) | |||
| Weight | Approx. 1.3kg | |||
| Standard Accessories | Shoulder strap, gas sampling hose, filter element (2 pieces), 4 × AA alkaline batteries, instruction manual | |||
| Optional | AC adaptor, sensor stocker, data logger kit | |||
*1 AC power adapter does not comply with CE marking.
Detectable Gas List
| Sensor Unit Model | Detectable Gas | Full Scale | |
| XDS-7NH | NH3 | Ammonia | 100 ppm |
| XDS-7SH | SiH4 | Silane | 25 ppm |
| XDS-7DC | SiH2Cl2 | Dichlorosilane | 25 ppm |
| XDS-7AH | AsH3 | Arsine | 250 ppb |
| XDS-7PH | PH3 | Phosphine | 1 ppm |
| XDS-7BH | B2H6 | Diborane | 500 ppb |
| XDS-7SE | H2Se | Hydrogen Selenide | 250 ppb |
| XDS-7GH | GeH4 | Germane | 1 ppm |
| XDS-7CL | Cl2 | Chlorine | 5 ppm |
| XDS-7CF | ClF3 | Chlorine Trifluoride | 1 ppm |
| XDS-7HC | HCl | Hydrogen Chloride | 25 ppm |
| XDS-7HF | HF | Hydrogen Fluoride | 10 ppm |
| XDS-7HB | HBr | Hydrogen Bromide | 10 ppm |
| XDS-7NO | NO | Nitrogen Monoxide | 100 ppm |
| XDS-7HS | H2S | Hydrogen Sulfide | 50 ppm |
| XDS-7CO | CO | Carbon Monoxide | 250 ppm |
| XDS-7DS | Si2H6 | Disilane | 25 ppm |
| XDS-7F2 | F2 | Fluorine | 5 ppm |
| XDS-7OZ | O3 | Ozone | 1 ppm |
| XDS-7SD | SO2 | Sulfur Dioxide | 10 ppm |
| XDS-7ND | NO2 | Nitrogen Dioxide | 10 ppm |
| XDS-7PF | PF3 | Phosphorus Trifluoride | 10 ppm |
| XDS-7NF | NF3 | Nitrogen Trifluoride | 100 ppm |