Features
Specifications
Model | XPS-7II | |||
Target Gas | Semiconductor gases | |||
Sensor Type | Electrochemical cell | |||
Detection Range | ppm | |||
Alarm Set Value | Depends on specifications | |||
Alarm Indication | Buzzer sounds, Alarm lamp (RED) flashing, LCD display | |||
Response Time | Within 60 seconds (60% response) | |||
Sampling Method | Automatic suction-type | |||
Power Supply |
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Battery Life | Approx. 12 hours (When using the NF3 sensor unit: approx. 8 hours) (When using alkaline batteries, at 20°C, no alarm. Varies depending on environmental conditions, usage conditions, storage period, battery manufacturer, etc.) | |||
Approvals | CE | |||
Operating Temperature and Humidity | 0°C to 40°C 30 to 85% RH (no condensation) | |||
External Dimensions | W62×H150×D128 mm (excluding protrusions) | |||
Weight | Approx. 1.3kg | |||
Standard Accessories | Shoulder strap, gas sampling hose, filter element (2 pieces), 4 × AA alkaline batteries, instruction manual | |||
Optional | AC adaptor, sensor stocker, data logger kit |
*1 AC power adapter does not comply with CE marking.
Detectable Gas List
Sensor Unit Model | Detectable Gas | Full Scale | |
XDS-7NH | NH3 | Ammonia | 100 ppm |
XDS-7SH | SiH4 | Silane | 25 ppm |
XDS-7DC | SiH2Cl2 | Dichlorosilane | 25 ppm |
XDS-7AH | AsH3 | Arsine | 250 ppb |
XDS-7PH | PH3 | Phosphine | 1 ppm |
XDS-7BH | B2H6 | Diborane | 500 ppb |
XDS-7SE | H2Se | Hydrogen Selenide | 250 ppb |
XDS-7GH | GeH4 | Germane | 1 ppm |
XDS-7CL | Cl2 | Chlorine | 5 ppm |
XDS-7CF | ClF3 | Chlorine Trifluoride | 1 ppm |
XDS-7HC | HCl | Hydrogen Chloride | 25 ppm |
XDS-7HF | HF | Hydrogen Fluoride | 10 ppm |
XDS-7HB | HBr | Hydrogen Bromide | 10 ppm |
XDS-7NO | NO | Nitrogen Monoxide | 100 ppm |
XDS-7HS | H2S | Hydrogen Sulfide | 50 ppm |
XDS-7CO | CO | Carbon Monoxide | 250 ppm |
XDS-7DS | Si2H6 | Disilane | 25 ppm |
XDS-7F2 | F2 | Fluorine | 5 ppm |
XDS-7OZ | O3 | Ozone | 1 ppm |
XDS-7SD | SO2 | Sulfur Dioxide | 10 ppm |
XDS-7ND | NO2 | Nitrogen Dioxide | 10 ppm |
XDS-7PF | PF3 | Phosphorus Trifluoride | 10 ppm |
XDS-7NF | NF3 | Nitrogen Trifluoride | 100 ppm |