Features
Specifications
Model | XP-703IIID | ||||
Target Gas | Semiconductor manufacturing gas (Arsine, Phosphine, Diborane, Silane, Hydrogen) | ||||
Sensor Type | Hot wire semiconductor | ||||
Detectable Leakage Amount | Arsine: 2.53à 10-7 PaâĒ m3 /s | Phosphine: 1.52à 10-7 PaâĒ m3 /s | Diborane: 1.01à 10-7 PaâĒ m3 /s | Silane: 2.53à 10-7 PaâĒ m3 /s | Hydrogen: 5.07à 10-7 PaâĒ m3 /s |
Detectable Concentration | 0.5 ppm | 0.3 ppm | 0.2 ppm | 0.5 ppm | 1.0 ppm |
Display Method | Intermittent sounds and flashing alarm lights | ||||
Response Time | Within 10 seconds (at a gas concentration three times the detectable concentration, sensitivity setting [4]) | ||||
Sampling Method | Automatic suction-type | ||||
Power Supply | 2 Ã AAA alkaline batteries | ||||
Battery Life*1 | Approx. 12 hours (At normal temperature and humidity) | ||||
Protection Rating *2 | IP22 | ||||
Operating Temperature and Humidity | 0°C to +40°C 85% RH or less (no condensation) | ||||
External Dimensions | W38ÃH130ÃD32 mm (excluding protrusions) | ||||
Weight | Approx. 190g (including batteries and leather case) | ||||
Standard Accessories | Leather case, drain filter, replacement filter element, gas probe, dust filter, hand strap, 2 Ã AAA alkaline batteries |
*1 May vary depending on environmental conditions, usage conditions, battery manufacturer, etc.
*2 When a leather case is attached.
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