Features
Specifications
| Model | XP-703IIID | ||||
| Target Gas | Semiconductor manufacturing gas (Arsine, Phosphine, Diborane, Silane, Hydrogen) | ||||
| Sensor Type | Hot wire semiconductor | ||||
| Detectable Leakage Amount | Arsine: 2.53× 10-7 Pa• m3 /s | Phosphine: 1.52× 10-7 Pa• m3 /s | Diborane: 1.01× 10-7 Pa• m3 /s | Silane: 2.53× 10-7 Pa• m3 /s | Hydrogen: 5.07× 10-7 Pa• m3 /s |
| Detectable Concentration | 0.5 ppm | 0.3 ppm | 0.2 ppm | 0.5 ppm | 1.0 ppm |
| Display Method | Intermittent sounds and flashing alarm lights | ||||
| Response Time | Within 10 seconds (at a gas concentration three times the detectable concentration, sensitivity setting [4]) | ||||
| Sampling Method | Automatic suction-type | ||||
| Power Supply | 2 × AAA alkaline batteries | ||||
| Battery Life*1 | Approx. 12 hours (At normal temperature and humidity) | ||||
| Protection Rating *2 | IP22 | ||||
| Operating Temperature and Humidity | 0°C to +40°C 85% RH or less (no condensation) | ||||
| External Dimensions | W38×H130×D32 mm (excluding protrusions) | ||||
| Weight | Approx. 190g (including batteries and leather case) | ||||
| Standard Accessories | Leather case, drain filter, replacement filter element, gas probe, dust filter, hand strap, 2 × AAA alkaline batteries | ||||
*1 May vary depending on environmental conditions, usage conditions, battery manufacturer, etc.
*2 When a leather case is attached.